Semicon Refractometer PR-23-MS

  • K-Patents Semicon Process Refractometer PR-23-MS has a built-in, ultra-pure, modified PTFE flow cell designed to keep all metal and corroding parts from coming into contact with the process liquid. All the wetted parts are made of ultra-pure, modified PTFE. The prism material is sapphire.

    The PR-23-MS is mounted directly in-line with a pillar or flare fitting. The compact design allows integration to a wet bench or to a cabinet, where the need for foot print area is very low.

    Key Features:

    • PR-23-MS is applied to process control and monitoring at the bulk chemical systems and in the in-situ wet process tools (blending, clean, etch and CMP).
    • Compact and mounted direct in-line without filtering. The measurement is not influenced by particles, bubbles, turbulent flow or impurities in the ppm range.
    • Provides a continuous measurement signal, 4-20 mA or digital.
    • Full measurement range Refractive Index nD 1.3200 – 1.5300, which corresponds to 0-100 % by weight. Optional range with nD 1.2600–1.4700 for strong HF.
    • Typical accuracy of 0.1% by weight, e.g. for HCl in water. For multi-component solutions, the measurement signal works as a check-sum.
    • Patented CORE-optics (US Patent No. US6067151): no drift, no re-calibration, no mechanical adjustments.
    • Dual connectivity: one transmitter can operate two sensors. A second sensor can be easily integrated later.
    • Ethernet connection and remote panel for data-logging and remote operation.
    • Process temperature range: -20°C – 150°C (-4°F – 300°F)
    • Fast process temperature measurement by built-in Pt1000 and automatic temperature compensation.
    • ATEX approved for Zone II, area classification EX II 3 G EEx nA II T4.
    • FM approved for Class I, Div. 2, Groups A, B, C and D, T6.
    • CSA certified for Class I, Div. 2, Groups A, B, C and D, T4.
    • cCSAus certified for Electrical Safety, Sensor: Class I, Pollution Deg. 3; Transmitter: Class I, Pollution Deg. 2; Installation Cat. II.

    3a

    Certified by EHEDG

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